Cannot separate data from one cell to multiple cells

[SP Brian]

I have a spreadsheet with approximately 115,000 rows that contains a column of information like what appears below. What I need to do is to take the number before the first _ and put it in a column in a spreadsheet, then take the number following the "_" and put it in another column, then take the number following the next _ and put it in a third column. Then for instances like the 10th row below, then take the next _ and put the numbers following that into a column.

0010030060000_ 4_ 0_ _
0010030060000_ 5_ 0_ _
0010150010000_ 4_ 0_ _
0010150010000_ 4_ 1_ _
0010150020000_ 3_ 0_ _
0010150020000_ 3_ 2_ _
0010150020000_ 3_ 1_ _
0010150020000_ 4_ 0_ _
0010150020000_ 4_ 1_ _
0010301847000_ST_4_1_ _
00101053_3_1_ _
01331843_2_0_ _


So, the results should look something like this:

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How can I do this? Thanks in advance.

[shg]

Data > Text to columns, tick Delimited, Next, in the Other box enter the underscore, Finish.